• Contact

Fully-automatic collection device NAC-300/NAC-301

 

Fully-automatic collection device NAC-300/NAC-301 Feature

NAC300S.jpg

NAC-300
●Work until diluting of the sample that collects gas-phase decomposition → pollution collection → is executed to the silicon wafer in the state that entered the career case by full automation.

●The sample is taken from a lot of wafers, and it exercises one's power over the analyzed usage.

●It has the measurement and the dilution function of the collected drug solution, and the work continuation in the state that the drug solution remains on the wafer is prevented.

●The acid atmosphere in the work space is prevented from crossing with the pollution of the worker side by the original, double door structure.

●It has the function to wash the open enclosure used for sampling automatically, and worker's time is reduced. (※Only the open enclosure for the surface :.)

 
自動回収装置 NAC-300/NAC-301 特長

NAC-301
●Work until diluting of the sample that collects gas-phase decomposition → pollution collection → is executed to the silicon wafer in the state that entered the career case by full automation.

●The sample is taken from a lot of wafers, and it exercises one's power over the analyzed usage.

●It has the measurement and the dilution function of the collected drug solution, and the work continuation in the state that the drug solution remains on the wafer is prevented.

●The acid atmosphere in the work space is prevented from crossing with the pollution of the worker side by the original, double door structure.

●It has the function to wash the open enclosure used for sampling automatically, and worker's time is reduced.(※ Correspond to the open enclosure for the surface and the side both.)

●An optional arm that installs an additional function of the bulk etching etc. can mount.

 
 

Fully-automatic collection device NAC-300/NAC-30 Specification

Device name NAC-300 NAC-301
Size of correspondence
125mm、150mm、200mm、300mm
Operation PC of main body equipment
Installation/detaching of open enclosure Ring sector, fixed radius, and circular arc
Supply of drug solution for sampling(※1) Side, rectangle, and lune
Collection of drug solution for sampling Ring fixed radius and collection pattern on side
Maintenance tool automatic operation washing for side -
Optional arm -
Externals (W×D×H) (mm)(※2) 1300×1200×2000 1300×1350×2000
Service space Drain, general exhaust, and acid exhaust
Necessary utility Power supply (AC100V 15A), purified water, N2, and clean dry air
※1:It becomes another estimate in the option.
※2:It doesn't contain an umbo..
 
▲To TOP on this page