NAC-300
●Work until diluting of the sample that collects gas-phase decomposition → pollution collection → is executed to the silicon wafer in the state that entered the career case by full automation.

●The sample is taken from a lot of wafers, and it exercises one's power over the analyzed usage.

●It has the measurement and the dilution function of the collected drug solution, and the work continuation in the state that the drug solution remains on the wafer is prevented.

●The acid atmosphere in the work space is prevented from crossing with the pollution of the worker side by the original, double door structure.

●It has the function to wash the open enclosure used for sampling automatically, and worker's time is reduced. (※Only the open enclosure for the surface :.)

NAC-301
●Work until diluting of the sample that collects gas-phase decomposition → pollution collection → is executed to the silicon wafer in the state that entered the career case by full automation.

●The sample is taken from a lot of wafers, and it exercises one's power over the analyzed usage.

●It has the measurement and the dilution function of the collected drug solution, and the work continuation in the state that the drug solution remains on the wafer is prevented.

●The acid atmosphere in the work space is prevented from crossing with the pollution of the worker side by the original, double door structure.

●It has the function to wash the open enclosure used for sampling automatically, and worker's time is reduced.(※ Correspond to the open enclosure for the surface and the side both.)

●An optional arm that installs an additional function of the bulk etching etc. can mount.