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Semiautomatic collection device SC-8000/SC-9000

 

Semiautomatic collection device SC-8000/SC-9000 Feature

SC-8000.jpg

SC-8000
●It can have the function that pollution can be collected from the wafer in the state of the hydrophilicity, and it sample it for wafers of the material other than silicon and wafers to which the surface has gotten rough because of the bulk etching etc.

●The limitation to the kind of the drug solution for the state of the wafer and sampling is eased, and the collections such as ions other than the heavy metal become possible, too.

●Of course, sampling the past on the canal side is also possible.

Please find the operation with movie here.
 
半自動回収装置 SC-8000/SC-9000 特長

SC-9000
●It can have the function that pollution can be collected from the wafer in the state of the hydrophilicity, and it sample it for wafers of the material other than silicon and wafers to which the surface has gotten rough because of the bulk etching etc.

●The limitation to the kind of the drug solution for the state of the wafer and sampling is eased, and the collections such as ions other than the heavy metal become possible, too.

●Of course, sampling the past on the canal side is also possible.

●Because the device side executes the supply of the drug solution for sampling and the movement of the open enclosure by the automatic operation, the worker can pollute it fewer compared with SC-8000.

 
 

Semiautomatic collection device SC-8000/SC-9000

Device name SC-8000 SC-9000
Size of correspondence 100mm、125mm、150mm、200mm、300mm
Operation PC(※2)
Installation/detaching of open enclosure Manual operation Manual operation
Supply of drug solution for sampling Manual operation Automatic operation
Collection of drug solution for sampling Manual operation Automatic operation(※1)
asic collection pattern Ring sector, fixed radius, and circular arc
Additional collection pattern (*1) Side, rectangle, and lune
Orientation flat processing (*1) Ring fixed radius and collection pattern on side
Sucking up type liquid collection (*1)
Externals (W×D×H) (mm) 480×495×500 800×495×500
Service space In Clean draft
Necessary utility Power supply (100~240VAC) (*3) and Clean dry air

※1:It becomes another estimate in the option.
※2:The personal computer will get the order mind in the guest or prepare it by another estimate (The RS-232C port or the universal serial bus port is necessary for WindowsXP or more).

※3:The model until October, 2008 is only for 100VAC.
The side of the wafer in the state of the hydrophilicity cannot be sampled. Please acknowledge it.
 
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