● Obtained International Patent for bevel recovery.
● The world's top-class function and technology in collectinghydrophilic surface.
● High-performance equipment to collect nano contamination on surfaces of silicon wafers.
● It can perform sampling nano metal contamination from the surface and sides (bevel parts) of silicon wafers.
● Able to collect contamination of both hydrophobic and hydrophilic wafer surfaces.
* Please note that bevel parts are when hydrophobic wafers only.
* Applied to hydrophilic surface: SC-8100 and SC-9100 only
● Can sample wafers made of materials other than silicon and wafers whose surface has been roughened by bulk
etching. (such as SiC, GaN, sapphire compounds, the surface on blanket film wafer)
● Possible to recover ions other than heavy metals.
● Supply of recovery liquid and suction of recovery liquid after sampling are performed automatically (SC-3000 and SC-9000 only).
● There is no specific skills needed of the operator as the sampling process is performed by the device, and everyone can operate it easily.
Sampling Operation Video of SC-9100 (Only in Japanese)
| Device Name | SC-3100 | SC-8100 | SC-9100 | |||||||
| Operation | PC (*3) | |||||||||
| Attaching / Detaching Liquid Holders |
Auto | Manual | Auto | |||||||
| Supply of Liquid for Sampling |
Auto | Manual | Auto | |||||||
| Collection of Liquid for Sampling |
Auto (*1) | Manual | Auto | |||||||
| Basic Sampling Pattern | Ring-shaped, Fan-shaped, Fixed, Radius, Arc | |||||||||
| Additional Sampling Pattern (*1) |
Side (Bevel), Rectangle, Circular Segment | |||||||||
| Orientation Flat (*2) | Ring-shaped, Fixed Radius, Side (Bevel) | |||||||||
| Sucking-Up Type Collection of Liquid |
〇 | ー | 〇 | |||||||
| Sampling of Hydrophilic Surface |
ー | 〇 | 〇 | |||||||
| Size (W×D×H) | 630×550×600 | 600×550×700 | 630×550×790 | |||||||
| Weight | 35Kg | 40Kg | 50Kg | |||||||
| Recommended Environment |
Inside Clean Draft | |||||||||
| Utilities | AC-100-240V, DIW, CDA | AC-100-240V, N2, CDA | AC-100-240V, DIW, N2, CDA |
|||||||
*1-3: Those options and PC will be quoted separately
